Institude of Integrated Mircosystems Funded Project
Project Title:
A Metal-Based Low-Temperature Micro-Fabrication Technology for Integrated Microsystems
Principal Investigator:
Prof. Man WONG,
Department of Electrical Engineering, HKUST
Project Duration:
Jul 1, 2002 to Dec 29, 2004
Project Summary:
This project developed metal-based low-temperature microfabrication and packagining
(encapsulation, bonding, etc) technology for micro inertia switches and so on.
With the developed technology at HKUST, the design, fabrication and characterization of
micro inertia switches have been successfullly achieved. In addition,
one micro vibration power generator has been fabricated with output power level around 0.1 mW.
It can be easily increased to a useful loevel of 1 mW with furthur development.
Research Output:
- Publication
- W. Ma, G. Li, Y. Zohar And M. Wong, "Fabrication
And Packaging Of Inertia Micro-Switch Using Metal-Electroplating Technology,"
MEMS 2003. The 14th IEEE International Conference, Kyoto, Japan, 20-23,
Jan, 2003, pp.610-613.
- W. Ma, Y. Zohar And M. Wong, "Design
And Characterization Of Micro-Inertia Switches Fabricated Using Low-Temperature
Metal-Electroplating Technology," MEMS Components And Applications For
Industry, Automobiles, Aerospace, And Communication II, Proceedings Of SPIE,
San Jose, Ca, USA, 28-29, Jan, 2003, pp. 214-221
- W. Ma, Y. Zohar And M. Wong. "Design
And Characterization Of Inertia Activated Electrical Micro-Switches Fabricated
And Packaged Using Low Temperature Photo-Resist Molded Metal-Electroplating
Technology," Journal Of Micromechanics And Microengineering, The Institute
Of Physics, Vol. 13(6), Nov/2003. pp. 892-899.
- W. Ma, G. Li, Y. Zohar And M. Wong. "Fabrication
And Packaging Of Inertia Micro-Switches Using Low Temperature Photo-Resist
Molded Metal-Electroplating Technology," Sensors And Actuators (A).
Elsevier. Vol. 111, Jan/2004. pp.63-70
- W. Ma, Y. Zohar And M. Wong. "Integration Of Inertia Micro-Switch On
Active Substrates Containing Pre-Fabricated Electronic Devices," The Asia-Pacific
Conference Of Tranducers And Micro-Nano Technology (APCOT MNT), Organized
Jointly With The International Conference On Electrical Engineering (ICEE
2004). July/4-7/2004. Sapporo, Japan. pp.778-782.
- Student trained
- Ma Wei. Successfully defended her PhD thesis on Jan/14/05.
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